Analog & Mixed Signal | Our Solutions | Lam Research
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Analog & Mixed Signal Solutions

Analog electronics are devices with a continuous variable signal, while digital electronics provide discrete signals and differentiate only two levels (such as “on” and “off”). As the name implies, mixed-signal devices contain both analog and digital circuits. Mixed-signal designs are cost-effective solutions commonly used to build consumer electronics applications, and this group of specialty devices has seen dramatic growth with the increased use of smartphones and other portable technologies. Processing equipment that provides high reliability and productivity cost-effectively is needed for the economical manufacture of analog and mixed-signal devices.


Analog & Mixed Signal

Our Solutions

DSiE Product Family

Deep Reactive Ion Etch (DRIE)

These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.

DV-Prime & Da Vinci Product Families

Wet Clean

These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.

Flex Product Family

Atomic Layer Etch (ALE) Cryogenic Etching Reactive Ion Etch (RIE)

Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.

Kallisto Product Family

Electrochemical Deposition (ECD)

An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

Kiyo Product Family

Reactive Ion Etch (RIE)

These market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.

Metior Product Family

Mass Metrology

Our mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.

OverViz

Plasma Modeling

OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.

Phoenix Product Family

Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Reliant Clean Products

Reliant Systems Wet Clean/Strip

Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

Reliant Deposition Products

Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems

Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

Reliant Etch Products

Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems

Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

SP Series Product Family

Wet Clean

This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.

Triton Product Family

Electrochemical Deposition (ECD) Wet Clean/Strip

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.

VECTOR Product Family

Plasma-Enhanced Chemical Vapor Deposition (PECVD)

Our PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.

Versys Metal Product Family

Reactive Ion Etch (RIE)

These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.

Recent Blog Posts

  • Lam Manufacturing Korea Ships Its 10,000th Process Module

    May 25, 2023

    This week, Lam Manufacturing Korea (LMK) shipped its 10,000th process module – a Flex® GL to a foundry/logic customer. LMK’s manufacturing footprint spans across three cities in South Korea - Osan, Yongin, and Hwaseong-si. Here, over 300 employees assemble tools across Lam’s etch and deposition product portfolio. Why it’s important: LMK not only supplies locally produced, innovative semiconductor tools to the South Korean market, but also exports globally, contributing to the local economy and the development of the Korean semiconductor ecosystem.

  • Lam Research Puts Electric Vehicles in the Fast Lane

    May 2, 2023

    ​Ever imagine driving a supercomputer around the neighborhood? As the price of electric vehicles (EVs) is reduced and the range at which EV batteries last increases, more and more people are ditching the gas pump for the wall plug. Why does this matter? When U.S. Commerce Secretary Gina Raimondo advocated for the U.S. CHIPS and Science Act, she described how the typical EV has 2,000 semiconductors. (Even traditional gas-powered vehicles use hundreds of chips.)

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